UA3000Ⅱ
Full-auto UV irradiator for 300mm wafer
Operation flow
Features
- 8""/6"" frame available
- UV irradiation time automatically calculation
- N2 purge
- Check mark stamp after UV irradiation
- Easy operation by Touch panel & Recipe function
- Log file function standard equipment
- Follow to CE mark / SEMI S2/S8"
Basic spesifications
- Applicable frame size： 300mm／200mm
- Applicable wafer size： 300mm／200mm
- Throughput： 60wafers/hr.
UA8400
Full-auto UV irradiator for 200mm wafer
Operation flow
Features
- 8"/6" frame available
- UV irradiation time automatically calculation
- N2 purge
- Check mark stamp after UV irradiation
- Easy operation by Touch panel & Recipe function
- Log file function standard equipment
- Follow to CE mark / SEMI S2/S8
Basic spesifications
- Applicable frame size： 8 inch／6 inch
- Applicable wafer size： 8 inch／6 inch／5 inch／4 inch
- Throughput：100wafers/hr.
UM810Ⅱ
Semi-auto UV irradiator for 8" wafer
Operation flow
Features
- UV Irradiation timer equipped (Setting range: 0 - 999sec.)
- N2 purge function
- UV illuminometer (Option)
- Irradiation area expand (to frame area) (Option)
Basic spesificatios
- Applicable frame size： 8 inch／6 inch
- Applicable wafer size： 8 inch or below
